8th Workshop - Beams & More

Do, 21. Oktober 2010

Beschreibung

8th Workshop Beams & More

This year’s program is divided into three main areas

- Progress of tools and technologies for mask making and for optical lithography
- Status of European multi e-beam technologies
- Master replication for different applications

Contributions in other areas round out the program.

More information you can find here.


StuttgartDE Germany