BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//142.132.130.121//NONSGML kigkonsult.se iCalcreator 2.20//
CALSCALE:GREGORIAN
METHOD:PUBLISH
X-WR-TIMEZONE:UTC
BEGIN:VEVENT
UID:event457@CC UPOB e.V.
DTSTAMP:20260418T015551Z
CATEGORIES:CC UPOB - Interne Veranstaltungen
DESCRIPTION:Current and Next Generation Lithography - Fundamentals and Appl
 ications\nKategorie: CC UPOB - Interne Veranstaltungen\nICS-Link: https://
 www.upob.de/index.php?option=com_jem&view=event&id=457:current-and-next-ge
 neration-lithography-fundamentals-and-applications\n
DTSTART;VALUE=DATE:20161024
DTEND;VALUE=DATE:20161029
LOCATION:Grenoble\,Grenoble
SUMMARY:Current and Next Generation Lithography - Fundamentals and Applicat
 ions
URL:https://www.upob.de/index.php?option=com_jem&view=event&id=457:current-
 and-next-generation-lithography-fundamentals-and-applications
END:VEVENT
END:VCALENDAR