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UID:event476@CC UPOB e.V.
DTSTAMP:20261017T051027Z
CATEGORIES:Info extern
DESCRIPTION:Plasma-Assisted Etching and Reactive Ion Etching Using High and
  Low Density Plasmas\n\nCategory: Info extern\nEvent Link: https://www.upo
 b.de/index.php?option=com_jem&view=event&id=476:plasma-assisted-etching-an
 d-reactive-ion-etching-using-high-and-low-density-plasmas
DTSTART;VALUE=DATE:20161024
DTEND;VALUE=DATE:20161026
LOCATION:Grenoble\,Grenoble
SUMMARY:Plasma-Assisted Etching and Reactive Ion Etching Using High and Low
  Density Plasmas
URL:https://www.upob.de/index.php?option=com_jem&view=event&id=476:plasma-a
 ssisted-etching-and-reactive-ion-etching-using-high-and-low-density-plasma
 s
X-ALT-DESC;FMTTYPE=text/html:<html><body><p>Plasma-Assisted Etching and Rea
 ctive Ion Etching Using High and Low Density Plasmas</p><p><strong>Categor
 y:</strong> Info extern</p><p><strong>Event Link:</strong> <a href='https:
 //www.upob.de/index.php?option=com_jem&amp\;view=event&amp\;id=476:plasma-
 assisted-etching-and-reactive-ion-etching-using-high-and-low-density-plasm
 as'>https://www.upob.de/index.php?option=com_jem&amp\;view=event&amp\;id=4
 76:plasma-assisted-etching-and-reactive-ion-etching-using-high-and-low-den
 sity-plasmas</a></p></body></html>
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