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BEGIN:VEVENT
UID:event477@CC UPOB e.V.
DTSTAMP:20261017T050955Z
CATEGORIES:Info extern
DESCRIPTION:Plasma Etching for CMOS Technology and ULSI Applications\n\nCat
 egory: Info extern\nEvent Link: https://www.upob.de/index.php?option=com_j
 em&view=event&id=477:plasma-etching-for-cmos-technology-and-ulsi-applicati
 ons
DTSTART;VALUE=DATE:20161026
DTEND;VALUE=DATE:20161029
LOCATION:Grenoble\,Grenoble
SUMMARY:Plasma Etching for CMOS Technology and ULSI Applications
URL:https://www.upob.de/index.php?option=com_jem&view=event&id=477:plasma-e
 tching-for-cmos-technology-and-ulsi-applications
X-ALT-DESC;FMTTYPE=text/html:<html><body><p>Plasma Etching for CMOS Technol
 ogy and ULSI Applications</p><p><strong>Category:</strong> Info extern</p>
 <p><strong>Event Link:</strong> <a href='https://www.upob.de/index.php?opt
 ion=com_jem&amp\;view=event&amp\;id=477:plasma-etching-for-cmos-technology
 -and-ulsi-applications'>https://www.upob.de/index.php?option=com_jem&amp\;
 view=event&amp\;id=477:plasma-etching-for-cmos-technology-and-ulsi-applica
 tions</a></p></body></html>
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