BEGIN:VCALENDAR
VERSION:2.0
PRODID:-//142.132.130.121//NONSGML kigkonsult.se iCalcreator 2.20//
CALSCALE:GREGORIAN
METHOD:PUBLISH
X-WR-TIMEZONE:UTC
BEGIN:VEVENT
UID:event477@CC UPOB e.V.
DTSTAMP:20260418T000303Z
CATEGORIES:Info extern
DESCRIPTION:Plasma Etching for CMOS Technology and ULSI Applications\nKateg
 orie: Info extern\nICS-Link: https://www.upob.de/index.php?option=com_jem&
 view=event&id=477:plasma-etching-for-cmos-technology-and-ulsi-applications
 \n
DTSTART;VALUE=DATE:20161026
DTEND;VALUE=DATE:20161029
LOCATION:Grenoble\,Grenoble
SUMMARY:Plasma Etching for CMOS Technology and ULSI Applications
URL:https://www.upob.de/index.php?option=com_jem&view=event&id=477:plasma-e
 tching-for-cmos-technology-and-ulsi-applications
END:VEVENT
END:VCALENDAR