MNE 2010 - 36th International Conference on Micro & Nano Engineering

Background Information
Micro- and Nano-Engineering (MNE) is an international conference on micro- and nano- fabrication and manufacturing using lithography and other nano-patterning related approaches. The Conference brings together engineers and scientists from all over the world to discuss recent progress and future trends in the fabrication, manufacturing and application of micro- and nano- structures and devices.

Scope of the Conference

1. Micro & Nano Lithography
a. Nanoimprint Lithography
b. Mask-Less Lithography
c. Photon Lithography
d. Electron and Ion Beam Lithography
e. Materials for Micro and Nano Lithography

2. Micro & Nano Fabrication, Nano Engineering
a. Nanofabrication with top-down and bottom-up approaches
b. Pattern Transfer and Plasma etching
c. Nanometrology
d. Nanoelectronic / photonic devices
e. Micro and Nanomanufacturing

3. Micro & Nano Fabrication for Life Sciences
a. Micro & Nano fluidics, devices for biology, chemistry, medicine
b. Micro & Nano Systems for biology, chemistry, medicine

4. Micro & Nano systems and their fabrication
MEMS, NEMS, Surface and bulk micro machining, 3D structures, stereolithography, new
materials, sensors and actuators, M(O)EMS, RF-MEMS/NEMS,
electromechanical passive devices, RF mechanical resonators…

Look here for more information.